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ZnO压电薄膜是一种很有实用价值的压电薄膜材料.本文概述了ZnO压电薄膜的特性、用途.着重叙述了ZnO压电薄膜的制作方法及影响因素,还叙述了用这种方法制作的ZnO压电薄膜在器件上的应用情况.
ZnO piezoelectric film is a kind of piezoelectric thin film material with great practical value.This paper summarizes the characteristics and the use of ZnO piezoelectric thin film.The article mainly describes the fabrication method of ZnO piezoelectric thin film and its influence factors, The production of ZnO piezoelectric film in the device on the application.