薄膜厚度是薄膜测试领域中非常重要的参数。利用直方图法处理触针式轮廓仪测试数据(标准样品、制备样品)得到台阶高度,是获取薄膜厚度的方法之一。通过对样品的台阶高度、椭偏测试计算结果的对比分析,发现直方图法能够有效避免人为因素的影响,适用于10nm以上的薄膜厚度的测量,是目前最适于定为薄膜厚度测试标准的方法。 Film thickness is a very important parameter in the field of film testing. Histogram processing stylus profiler test data (standard samples, sample preparation) to obtain the height of the step, is one of the methods to obtain the thickness of the film. Through the comparative analysis of the step height and the ellipsometer test results, it is found that the histogram method can effectively avoid the influence of human factors and is suitable for the measurement of the film thickness above 10 nm, which is the most suitable test standard for the film thickness method.