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本文主要目的是详细地研究使用数百对乃至千对的多对叉指换能器的表面声波谐振器,并阐述多对典型叉指换能器的理论分析结果。在多对叉指换能器中,由电极指所产生的周期扰动对叉指换能器的特性影响极大,如本文中考虑到周期扰动的影响,则根据耦合波型理论进行分析,叉指换能器中的表面波与自由表面中的前进波和后退波近似一次结合,其结果可求出叉指换能器的 S 参数和表面声波谐振器的频率特性。例如,计算了 ST 切割的晶体基片上的多对叉指换能器的输入阻抗和传输特性,表明与实验结果完全一致。而且与此结果比较,晶体基片上的多对叉指换能器中的电极指的声周期扰动对叉指换能器特性的影响是很明显的。
The main purpose of this paper is to study in detail the surface acoustic wave resonators that use pairs of pairs or even pairs of pairs of interdigital transducers and to explain the theoretical analysis of many pairs of typical interdigital transducers. In many pairs of interdigital transducers, the periodic perturbation caused by the electrode fingers greatly affects the characteristics of interdigital transducers. Considering the effect of periodic perturbation in this paper, we analyze according to the coupled wave theory, Refers to the transducer surface wave and the free surface of the forward and backward wave approximately one combination, the results can be obtained for the S-finger transducer and the surface acoustic wave resonator frequency characteristics. For example, the input impedance and transmission characteristics of multiple pairs of interdigital transducers on a ST-cut crystal substrate were calculated, showing complete agreement with experimental results. Moreover, compared with this result, the effect of the acoustic periodic perturbations of the electrode fingers in the plurality of pairs of interdigital transducers on the crystal substrate on the interdigital transducer characteristics is obvious.