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金刚石磨粒表面镀镍可以增强其与树脂的结合力。通过化学镀的方法在金刚石磨粒表面镀覆一层不同包覆率的Ni-P合金层,并制成了固结磨料研磨垫。采用CP-4型CMP抛光和测试系统,分别对蓝宝石进行粗研和精研加工,探索不同覆镍量对固着磨料研磨蓝宝石性能的影响。结果表明:金刚石磨粒表面镀镍可以改变其微观形貌:在实验范围内,随着金刚石包覆率的增加,摩擦因数、材料去除率和表面粗糙度呈现先增大后减小的趋势,其中粗研在包覆率为50%、精研在包覆率30%达到峰值;声发射信号呈现先减小后增大的趋势,其中粗研在包覆率50%、精研在包覆率30%达到谷值;粗研过程对包覆率的要求高于精研过程。
Nickel on the surface of diamond abrasive particles can enhance its binding force with the resin. Electroless plating method was used to coat the surface of diamond abrasive with a layer of Ni-P alloy with different coverage, and a consolidated abrasive polishing pad was made. CP-4 CMP polishing and testing system was used to conduct roughing and lapping of sapphire respectively to explore the effect of different nickel content on the wear properties of abrasive sapphire. The results show that the micro-topography can be changed by Ni plating on the surface of diamond abrasive grains. The friction coefficient, material removal rate and surface roughness increase first and then decrease with the increase of diamond coating rate in the experimental range. Among them, Roughness was at the coverage rate of 50%, and the lapping at the coverage rate of 30% reached the peak value. The AE signal showed the trend of decreasing firstly and then increasing, of which Roughness was at the coverage rate of 50% The rate of 30% reached the bottom; crude research process of the coating rate requirements higher than the lapping process.