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飞秒激光具有超短脉宽和极高峰值强度,已广泛应用于精细加工与微纳制造领域。目前,激光直写技术用于柔性器件的制备受到极大的关注。综述了激光直写技术的四个研究方向:1)激光直写微透镜用于广角成像;2)激光制备纳米金/还原氧化石墨烯微超级电容器;3)聚酰亚胺基体上多层超级电容器的制备;4)电容生物传感器的激光制备。同时介绍了本课题组开展的相关研究工作,可为激光直写制备微纳结构器件的研究与应用及未来发展方向提供参考。
Femtosecond laser with ultra-short pulse width and very high peak intensity, has been widely used in fine processing and micro-nano manufacturing. At present, the laser direct writing technology for the preparation of flexible devices receives great attention. Four research directions of laser direct writing technology are reviewed: 1) laser direct write microlens for wide-angle imaging; 2) nano-gold / reduced graphene micro-supercapacitor by laser; 3) Capacitor preparation; 4) capacitive biosensor laser preparation. At the same time, the research work carried out by our group is introduced, which can provide reference for the research and application of micro-nano structure devices for laser direct writing preparation and future development direction.