浮板是大型气浮轴承三大件之一。它的工作面是个超零级的大圆平面,加工中的检测和检定成为关键技术问题。一、测量方法的选择图1是大圆平面,工作面A不平度误差不大于0.003mm。因被测平面精度高、研磨面的面积大,故平晶法、刀口尺法、色点法都不适用。另外,由于难以获得超高精度的大平尺和平台, Floating board is one of the three large flotation bearings. Its face is a super-zero plane of the great circle, the processing of testing and verification become the key technical issues. First, the choice of measurement method Figure 1 is a large circle plane, the unevenness of the A surface roughness is not greater than 0.003mm. Due to the high precision of the measured plane, the area of ​​the grinding surface is large, so the flat crystal method, blade edge method, color point method are not applicable. In addition, due to the difficulty of obtaining ultra-high precision flat feet and platforms,