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本文介绍利用美国伯克利Ｌａｗｒｅｎｃｅ实验室的Ｍｅｖｖａ金属离子注入机在退火后的纯铁表面进行多种元素离子注入．利用透射电子显微镜对表层合金及次表层中的第二相作了电子衍射结构分析，并研究了离子注入所形成的表层耐蚀合金的组织、结构及其腐蚀性能。结果表明：纯铁表面注入能量为３８～５５ｋｅＶ，剂量为（０．５～６）×１０１６／ｍ２的Ｃｒ＋，Ｎｉ＋，Ｔｉ＋多种元素的离子，能在表层形成非晶＋微晶型的耐蚀合金，次表层中形成Ｔｉ２Ｎｉ合金第二相，并有大量位错。
This article describes the use of Mevva metal ion implanter at Lawrence Laboratories, Berkeley, USA to perform multiple elemental ion implants on annealed pure iron surfaces. The second phase of the surface alloy and the subsurface was analyzed by TEM. The microstructure, structure and corrosion resistance of the corrosion resistant alloy formed by ion implantation were studied. The results showed that ions of Cr +, Ni +, Ti + ions with energy of 38-55 keV and dosage of (0.5-6) × 1016 / m2 were implanted on the surface of pure iron to form amorphous and microcrystalline Erosion of the alloy, subsurface Ti2Ni alloy formed in the second phase, and a large number of dislocations.