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用干涉法研究了热蒸发(PVD)方法制备的CdTe薄膜材料的红外光学特性.通过对不同基板温度和不同薄膜厚度CdTe薄膜样品的研究,确定了在薄膜沉积过程中基板温度和膜厚对CdTe薄膜红外光学特性的影响.发现CdTe薄膜具有一定的非均匀性,其折射率随着薄膜厚度的增加而减小.在120~200℃范围内,基板温度对CdTe薄膜红外光学特性的影响不大.
The infrared optical properties of CdTe thin films prepared by the thermal evaporation (PVD) method were studied by using the interference method. The effects of substrate temperature and film thickness on the infrared optical properties of CdTe thin films were investigated by studying CdTe films with different substrate temperatures and different film thicknesses. It is found that the CdTe film has a certain non-uniformity, and its refractive index decreases with the increase of the film thickness. In the range of 120 ~ 200 ℃, the substrate temperature had little effect on the infrared optical properties of CdTe films.