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一、前言砷化镓霍尔元件是一种适用于制造测磁探头的半导体元件,霍尔电压线性度小于千分之三,测量的磁场值可以用数字电压表显示,选用不同成分的砷化镓单晶,可以分别制成高灵敏度(≥10mV/mA·KGS)和低灵敏度(=2mV/mA·KGS)、高稳定性(温度由20℃～100℃,零点漂移<20μV)的磁测量探头。高灵敏度探头可以降低对测量仪表灵敏度的要求,能大幅度降低数字特斯拉计的价格,有利于国内目前应用的CT3和CT5高斯计的更新换代。低灵敏度高稳定性探头能进一步提高国内现有数字特斯拉计的精度,可以用于长时期精确测量磁路的磁场分布,也可用于测试磁性材料的温度系数。目前,由于采用了特殊工艺,砷化镓霍尔元件的截面已能缩小到1×1mm~2,已制造了外径φ2的轴向探头。霍尔元件截面积的缩小有利于提高对被测磁场分布的分辨
I. Introduction Gallium arsenide Hall element is a semiconductor element suitable for making magnetometer probe, the Hall voltage linearity is less than three thousandths, the measured magnetic field value can be displayed by digital voltmeter, choose different composition of arsenic Gallium single crystal can be made into high sensitivity (≥10mV / mA · KGS) and low sensitivity (= 2mV / mA · KGS), high stability (temperature from 20 ℃ ~ 100 ℃, zero drift <20μV) Probe. High-sensitivity probe can reduce the sensitivity of the measuring instrument requirements, can significantly reduce the price of digital Tesla meter, is conducive to the current application of CT3 and CT5 Gauss meter replacement. The low sensitivity and high stability probe can further improve the accuracy of the existing domestic digital Tesla meter. It can be used to accurately measure the magnetic field distribution of the magnetic circuit for a long period of time, and can also be used to test the temperature coefficient of the magnetic material. At present, thanks to a special process, the cross-section of the gallium arsenide Hall element has been reduced to 1 × 1mm ~ 2, has manufactured an external diameter φ2 axial probe. The reduction of the cross-sectional area of the Hall element helps to improve the resolution of the measured magnetic field distribution