论文部分内容阅读
通过真空蒸发沉积技术在叉指状电极上制备了酞菁铅薄膜气体传感器。实验发现,酞菁铅薄膜对甲醇和丙酮这两种蒸气具有很高的灵敏度。对于甲醇蒸气,酞菁铅薄膜具有很快的响应速度,吸附和脱附时间只要2~3s,信号随即趋于稳定。对于丙酮蒸气,在吸附的初试阶段酞菁铅薄膜的响应时间与吸附甲醇蒸气时的相差不大,但酞菁铅薄膜的电阻率在经过这个快速响应变化以后并不趋向一个稳定值而是缓慢上升,最后甚至比吸附前的电阻率略高。通过电阻率－气体吸附时间响应曲线的瞬态特性分析,方便、清楚地区分了甲醇和丙酮两种液体。
Lead phthalocyanine thin film gas sensors were fabricated on the interdigitated electrodes by vacuum evaporation deposition. The experiment found that lead phthalocyanine film has high sensitivity to both methanol and acetone vapors. For methanol vapor, lead phthalocyanine film has a fast response speed, adsorption and desorption time as long as 2 ~ 3s, then the signal tends to be stable. For acetone vapor, the response time of the lead phthalocyanine film in the first stage of adsorption was not different from that of the methanol vapor adsorption, but the resistivity of the lead phthalocyanine film did not tend to a stable value but slow after the rapid response change Rise, and finally even slightly higher than the resistivity before adsorption. Through the analysis of the transient response of the resistivity-gas adsorption time response curve, it is convenient and clear to distinguish between methanol and acetone.