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扫描电子显微镜是对人工欧泊光子晶体进行形貌观察、研究的重要手段。本文利用扫描电子显微镜对人工欧泊晶体及其填充InP后的形貌进行了分析。结果发现,二氧化硅微球短程有序而在较大的区域则出现台阶、空位和失配等缺陷;在选定生长条件下,InP在SiO2 球空隙间具有较高的填充率和较好的结晶质量。此项研究为制备三维InP光子晶体提供了科学依据。
Scanning electron microscopy is an important means to observe and study the morphology of artificial Opal photonic crystal. In this paper, the use of scanning electron microscopy artificial Opal crystal and its morphology after filling InP was analyzed. The results showed that silica microspheres were short-range and orderly, while defects such as step, vacancy and mismatch appeared in the larger region. Under the selected growth conditions, InP had a higher filling rate and better Of the crystalline quality. This study provides a scientific basis for the preparation of three-dimensional InP photonic crystals.