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该文用磁控溅射法制备了一系列Fe-N/TiN纳米多层膜;利用广角和小角X射线衍射和俄歇电子能谱对多层膜的微观结构和成分进行了测试;利用纳米硬度计和纳米划痕仪研究了多层膜的微观力学性能。固定Fe-N层厚度为20nm,改变TiN层的厚度,研究了TiN层厚度变化对Fe-N/TiN纳米多层膜的附着力、硬度、弹性模量等性能的影响。发现TiN层为2nm时多层膜有最好的力学性能,说明对Fe-N/TiN多层膜来说,对力学性能影响最大的是多层膜的调制周期。
In this paper, a series of Fe-N / TiN nano-multilayer films were prepared by magnetron sputtering. The microstructures and compositions of multilayer films were tested by wide-angle and small angle X-ray diffraction and Auger electron spectroscopy. Hardness and nano-scratch tester multilayer mechanical properties of the micro-mechanical. The effect of the thickness of TiN layer on the adhesion, hardness and elastic modulus of the Fe-N / TiN nano-multilayers was investigated. It is found that the best mechanical properties of multilayer films are obtained when the thickness of TiN layer is 2nm, which indicates that the modulation cycle of multilayer films is the most important for the mechanical properties of Fe-N / TiN multilayer films.