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针对溅射离子泵高压电源应具有的负阻特性,本文详细介绍了负阻性DC/DC开关电源控制电路的组成和工作原理。在此基础上,成功研制了一台输出电压根据真空系统气体压力连续自动调节,可短路工作的高压DC/DC开关电源。该电源具有外特性响应好、结构简单和可靠性高等特点。
In view of the negative resistance characteristic of sputtering ion pump high voltage power supply, this paper introduces the composition and working principle of negative resistance DC / DC switching power supply control circuit in detail. On this basis, successfully developed a high-voltage DC / DC switching power supply with output voltage automatically adjusted according to the gas pressure in the vacuum system and can be short-circuited. The power supply has the characteristics of good external response, simple structure and high reliability.