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本文介绍用X射线衍射法对单层高强度硫化锌增透膜所进行的分析。对在不同制备工艺和不同的热处理条件下所形成的膜层的实验数据进行比较,结果表明:在特定的工艺和热处理条件下长成的高强度硫化锌增透膜是具有择优取向的多晶β—ZnS膜,择优取向为[110]。本文从这种晶体结构的特性对其膜的成因及其性能进行了初步探讨。
This article describes the X-ray diffraction of single-layer high-strength zinc sulfide antireflection coating carried out by the analysis. The experimental data of the films formed under different preparation conditions and different heat treatment conditions are compared. The results show that the high strength zinc sulfide AR coatings grown under specific process and heat treatment conditions are polycrystalline with preferred orientation β-ZnS film, the preferred orientation of [110]. This article from the crystal structure of the characteristics of its film and its properties were discussed.