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本文用HU—11透射电镜对铟—镓/锗与铟—镓/碳双层膜加热前后形貌进行了观察。同时用选区电子衍射对该双层膜加热前后的晶化情况进行了观察。得出的结果如下: 一、铟—镓膜的存在使非晶锗膜的晶化温度显著降低。各个温度下铟—镓/锗双层膜的晶化情况如下表:
In this paper, HU-11 transmission electron microscopy of indium - gallium / germanium and indium - gallium / carbon bilayer heating film morphology was observed. At the same time, the crystallization of the bilayer membrane before and after the heating was observed by the selected area electron diffraction. The results are as follows: First, indium - gallium film amorphous germanium film crystallization temperature was significantly reduced. The crystallization of indium-gallium / germanium bilayer at each temperature is shown in the following table: