纳米摩擦学的提出适应现代科学技术发展的需要.传统的摩擦磨损和润滑理论经过百多年的发展,虽然已经比较完善地解决一般工程设计问题,但对于摩擦学机理的认识和实现主动控制还存在许多问题,特别是对于微型机械或超精密机械中,例如极轻载荷、纳米尺度间隙下的摩擦磨损和润滑问题.宏观摩擦学已不适用.摩擦力显微镜(Friction force micro-scope,以下简称FFM)的出现为人们能在纳米尺度上进行摩擦磨损实验提供了有效工具.虽然国外学者已利用FFM作了许多工作,但用FFM进行纳米摩擦学实验并不象宏观摩擦磨损实验那样成熟.我们在研制FFM的基础上利用FFM进行了尝试性试验,本文报道了一些初步结果.关于摩擦力显微镜的描述见文献[7].作为摩擦力显微镜力传感器用的微悬臂是通过镀膜、刻蚀等工序制作而成.微悬臂呈三角形结构,材料为Si_3N_4,自由端有一个金字塔形微探针.当探针与样品接触时,可以控制压电陶瓷的伸缩使微悬臂产生不同程度的弯曲,从而实现微载荷定量设定,微载荷可通过下式求得:L=k·△h=k·p·△V,(1)其中k是微悬臂的弹性系数;△h是微悬臂的法向位移;p为压电陶瓷的伸缩系数;△V为加在压电陶瓷上的电压变化.实验材料有3种,分别为精抛光玻璃表面真空沉积的金膜、激光唱盘基片和小分子花生酸与高分子液晶 Nano-tribology proposed to meet the needs of the development of modern science and technology.Traditional friction and wear and lubrication theory after more than a hundred years of development, although it has been relatively complete to solve the general engineering design problems, but understanding of the tribological mechanism and the realization of active control There are many problems, especially for micro-mechanical or ultra-precision machines, such as very light loads, frictional wear and lubrication problems at nanoscale gaps, macroscopical tribology has not been applied Friction force micro-scope FFM) has provided an effective tool for people to conduct friction and wear experiments on the nanometer scale.Although many scholars have done a lot of work using FFM, the nano-tribological experiments with FFM are not as mature as the macro-friction and wear experiments. A tentative test was carried out using FFM based on the development of FFM, and some preliminary results were reported in this paper. A description of the friction microscope is given in [7]. Micro-cantilevers used as force sensors for friction microscopy are obtained by coating, etching, etc. Process made of microcantilever triangular structure, the material is Si_3N_4, the free end of a pyramid When the probe is in contact with the sample, the micro-can be quantitatively controlled by controlling the expansion and contraction of the piezoelectric ceramic to make the cantilever bent to different degrees. The micro-load can be obtained by the following equation: L = k · △ h = k · p · ΔV, (1) where k is the elastic coefficient of the micro-cantilever; △ h is the normal displacement of the micro-cantilever; p is the expansion and contraction coefficient of the piezoelectric ceramic; △ V is applied to the piezoelectric ceramic Of the voltage changes.Experimental materials have three kinds, respectively, the vacuum-deposited gold film on the surface of polished glass, laser disc substrate and small molecules of arachidic acid and polymer liquid crystal