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静电悬浮加速度计的检测质量闭环点位置偏离电极框中心时会造成系统非线性误差,调整检测电路输出电压可调整检测质量闭环点,而在调整过程中发现反馈电压变化会引起电容检测电路输出电压漂移,从而影响闭环点调节精度。为解决此问题,研究了闭环点位置与检测电路输出电压变化的关系,推导了检测电路传递函数,初步确定了反馈电压对检测电路输出电压影响的原因是隔直电容选取不恰当,通过实验对比了材料为C0G、Y5P、X7R及SL的多层陶瓷电容作为隔直电容时输出电压与反馈电压关系。实验结果表明:采用低温漂、耐高压和受频率影响小的C0G电容作为隔直电容能够消除反馈对检测电路引起的输出电压漂移,从而消除调节闭环点过程中闭环点位置的漂移,并且能提高检测电路稳定性。
Static suspension accelerometer detection quality of the closed-loop position deviation from the center of the electrode frame will cause system nonlinearity error, adjust the detection circuit output voltage can adjust the detection of quality closed-loop point, and found in the adjustment process, the feedback voltage changes will cause the capacitance detection circuit output voltage Drift, thus affecting the accuracy of closed-loop point adjustment. In order to solve this problem, the relationship between the closed-loop position and the output voltage of the detection circuit was studied. The transfer function of the detection circuit was deduced. The reason for the influence of the feedback voltage on the output voltage of the detection circuit was preliminarily determined. The material for the C0G, Y5P, X7R and SL multilayer ceramic capacitors as a blocking capacitor output voltage and feedback voltage relationship. The experimental results show that using low temperature drift, high voltage and low frequency C0G capacitor as the blocking capacitor can eliminate the output voltage drift caused by the feedback to the detection circuit, so as to eliminate the drift of the closed-loop position during the closed-loop regulation, Detection of circuit stability.