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本文应用现代控制理论,建立了计算机控制的液封法直拉砷化镓单晶的数学模型,在这基础上设计了一个由电视机对直径的采样值以及加热功率构成的三阶闭环控制系统.
Based on the modern control theory, a computer-controlled mathematical model of the liquid-sealed Czochralski (GaAs) single crystal was established. Based on this, a third-order closed-loop control system consisting of the sampling value of the diameter of the TV and the heating power .