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1情况简介自2009年溅射工艺线建立完成后,先后进行了多次不锈钢靶的溅射实验,检验了整套工艺线的运行状况,并对溅射膜的均匀性进行了测量。2工艺研究铜基铌溅射工艺研究可分为以下几个步骤进行:1)不锈钢靶的挂片溅射实验:完成溅射工艺基本参数和基本条件的摸索,其主要考察玻璃挂片上溅射层的膜厚和均匀性,并以此来调节溅射靶的位置、溅射电流、溅射时间等参数。
1 Introduction Since its establishment in 2009, the Sputtering Line has conducted a number of sputtering experiments on stainless steel targets to test the operation of the entire process line and to measure the uniformity of the sputtering film. 2 Process Research Copper-based niobium sputtering process can be divided into the following steps: 1) stainless steel target coupon sputtering experiment: the completion of the basic parameters of sputtering process and the basic conditions of exploration, the main study of glass hanging on the sputtering Layer thickness and uniformity, and to adjust the sputtering target position, sputtering current, sputtering time and other parameters.