众所周知,在本世纪六十年代初期,半导体平面工艺的出现,引起了半导体技术的重大变革,使得一些新型的半导体器件迅速发展。从此,平面工艺也就成为目前广泛使用的各种硅平面晶体管、半导体集成电路、特别是大规模集成电路研制生产和发展的技术基础。近二十年来,它已发展成了制造半导体器件、特别是制造各种微波晶体管和集 As we all know, in the early 1960s, the emergence of semiconductor planar technology, has led to major changes in semiconductor technology, making some of the rapid development of new semiconductor devices. Since then, the planar technology has become the currently widely used silicon planar transistors, semiconductor integrated circuits, especially the development and production of large scale integrated circuit technology base. For nearly two decades, it has evolved into the manufacture of semiconductor devices, especially the manufacture of various microwave transistors and sets