一、序棱镜-波导耦合器是集成光学中很重要的一种耦合器。它不仅能以很高的耦合效率将光耦合入光学波导,而且还是研究光学波导的重要工具。用来测量薄膜的光学特性,(通常称作m谱线法)能简单而准确地同时测得薄膜的折射率和厚度,其精度可以与椭圆仪相比拟。改进这种方法,能测量薄膜各点的特性,并适于吸收薄膜。田中敬 First, sequence prism - waveguide coupler is a very important integrated optical coupler. Not only does it couple light into optical waveguides at high coupling efficiencies, it is also an important tool for studying optical waveguides. Used to measure the optical properties of thin films (commonly referred to as m-line methods), the refractive index and thickness of thin films can be simultaneously and simply measured with accuracy comparable to ellipsometers. Improve this method, can measure the characteristics of each point of the film, and suitable for absorbing the film. Tanaka