Trimethoxysilyl-functionalized PPEK(PKGS)films bad been designed to serve as wear resistant coatings for silicon surfaces.These surface films were formed by a dip-coating technique applied to self-assembled monolayers(SAMs).The formation and wetting behavior of PKGS films were characterized by means of contact angle measurement.The friction coefficient of the film prepared is very low(about 0.1),and the anti-wear behavior is good,with a lack of failure after sliding over 1800 s.