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综述了近年来金刚石和类金刚石薄膜电子场发射性能的研究进展。金刚石薄膜是出色的场发射材料,由于其很低的或者是负的电子亲和势(导带能级位于真空能级之上)和良好的化学稳定性,在真空微电子和场发射显示领域具有广阔的应用前景。
The research progress of electron field emission properties of diamond and diamond-like carbon films in recent years is reviewed. Diamond thin films are excellent field emission materials that, due to their very low or negative electron affinity (conduction band level above the vacuum level) and good chemical stability, are used in the field of vacuum microelectronics and field emission displays have a broad vision of application.