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文章介绍了超高真空设备放气的理论,并给出两种放气模型:schram吸附模型和吸附-扩散模型;对设备的放气理论值进行了计算,并通过四极质谱仪得出的残余气体质谱图分析出材料放气的成分.abstract：this paper discusses the outgassing theory and two outgassing models of materials,that is,schram adsorption model and the adsorption-diffusion model based o