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采用溶胶-凝胶法将氧化钇(Y2O3)敏感膜固定在锡掺杂玻璃光波导表面,研制出了Y2O3薄膜/锡掺杂玻璃光波导气敏元件,并对挥发性有机气体进行了检测。通过XRD测试对敏感薄膜的结构及晶粒尺寸进行了表征。实验结果表明,在室温下Y2O3薄膜/锡掺杂玻璃光波导气敏元件对二甲苯、氯苯气体有较好的选择性响应,其响应浓度范围为1×10-3～1×10-5(V/V)。Y2O3薄膜/锡掺杂玻璃光波导气敏元件具有灵敏度高、成本低、响应速度快、制作工艺简单和可逆性好等优点。
A Y2O3 thin film / tin-doped glass optical waveguide gas sensor was fabricated by sol-gel method using Y2O3 as a sensitive film on the surface of tin-doped glass optical waveguide. Volatile organic gas was also detected. The structure and grain size of the sensitive films were characterized by XRD. The experimental results show that Y2O3 thin film / tin-doped glass optical waveguide gas sensor has good selective response to xylene and chlorobenzene gas at room temperature, and the response range is 1 × 10-3 ~ 1 × 10-5 (V / V). Y2O3 thin film / tin-doped glass optical waveguide gas sensor with high sensitivity, low cost, fast response, the production process is simple and reversible and good.