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进入科技发展日新月异的21世纪,微电子技术仍然是信息产业的主要技术支撑。MOS集成电路已成为微电子产业的核心,它在向高集成和低成本方向发展的过程中,遵循着3年增长4倍、特征尺寸每3年缩小2~(1/2)倍的摩尔定律,带动着半导体制造设备的不断革新。围绕这一目标,中国的科研人员们正在为中国的微电子技术不断发展而埋头苦干。作为其中一员,中国科学院光电技术研究所研究员严伟及其所在的团队,致力于研究微细加工技术,专注国家微电子装
Into the rapid technological development in the 21st century, microelectronics technology is still the main technical support for the information industry. MOS integrated circuits have become the core of the microelectronics industry. In the direction of high integration and low cost, Moore’s law follows the Moore’s Law which is four times more than three years and the feature size is reduced by two to one-half times every three years , Driving the continuous innovation of semiconductor manufacturing equipment. Around this goal, Chinese researchers are working hard for the continuous development of China’s microelectronics. As one of the members, the Institute of Optoelectronic Technology, Chinese Academy of Sciences researcher Yan Wei and his team dedicated to research micro-processing technology, focus on the national microelectronics