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本文报道了面预电离F原子激光和XeF激光输出能量以及F原子激光光斑随各气体分压的变化情况。在适当的气体混合物中放电获得了F原子和XeF准分子激光充满放电截面的完整光斑，取得了满意预电离效果。获得了F原子623．9nm、634．8nm、712．8nm和731．1nm四波长激光同时振荡以及F原子激光和XeF激光同时振荡，并作了定性分析。
In this paper, we report the change of surface pre-ionization F-atom laser and XeF laser output energy and F atom laser spot with the partial pressure of gas. In the proper gas mixture, F atoms and XeF excimer laser were used to fill the complete flare of the discharge cross section, and the satisfactory preionization effect was achieved. The simultaneous four-wavelength laser oscillation of F atom at 623.9nm, 634.8nm, 712.8nm and 731.1nm, simultaneous oscillation of F-atom laser and XeF laser were obtained and analyzed qualitatively.