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本文讨论物方摆动镜光机扫描方案中物方摆动镜的安装精度对扫描结果所造成的影响,给出这种影响的计算方法和例子,从而阐明如何依据允许的扫描误差来确定摆动镜安装精度的问题。
This article discusses the effect of the installation accuracy of the object-side oscillating mirror on the scanning result in the scanning scheme of the object-side oscillating mirror machine and gives the calculation method and example of this effect, so as to clarify how to determine the installation of the oscillating mirror according to the allowed scanning error Accuracy problems.