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为在深凹球面内激光直写高质量网栅图形,必须实现写入过程恒定曝光量控制。首先介绍了深凹球面网栅激光直写设备原理,然后分析了任意纬线扫描运动状态,推导了工件尺寸、网栅参数、扫描速度间数学关系,最后建立了恒定曝光量扫描运动数学模型,开发了伺服控制软、硬件系统,确保了扫描角速度随纬度自动精确调整来保持线速度不变,实现了深凹球面网栅激光直写恒定曝光量控制,提高了写入线条质量。在矢跨比为0.31的深凹球面内制备了周期500μm的网栅,显影后测得线条线宽均匀,侧壁陡直,线宽误差≤±1%,网格周期误差≤±5%。
To write high-quality grid patterns in a deep concave spherical laser, constant exposures must be achieved during writing. First of all, the principle of deep concave spherical grid laser direct writing equipment is introduced. Then the movement state of any latitude scanning is analyzed. The mathematical relationship between workpiece size, grid parameter and scanning speed is deduced. Finally, a constant exposure scanning mathematical model is developed. The servo control software and hardware system ensures that the scanning angular velocity automatically adjusts accurately with latitude to keep the linear velocity constant, and realizes the control of the direct exposure of the concave spherical grid laser direct exposure and improves the quality of the written lines. A grid with a period of 500μm was prepared in a deep concave spherical with aspect ratio of 0.31. The line width of the line after the development was uniform and the sidewall was steep. The error of the line width was ≤ ± 1% and the grid cycle error was ≤ ± 5%.