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针对高功率板条激光器核心工作器件——板条Nd:YAG晶体的超精密加工开展研究,分析了具有特殊构型的板条Nd:YAG晶体元件的加工性能及工艺难点,提出了一种新的基于合成盘抛光的板条Nd:YAG晶体加工工艺,并对规格为100mm×30mm×3mm的板条Nd:YAG晶体进行了加工实验。实验结果表明,合成盘抛光可以很好地控制元件的塌边现象;通过磨料的优化选择,在合成盘抛光工艺中匹配合适粒度的Al2O3磨料能够实现元件的低缺陷加工,元件下盘后的全反射面平面度达0.217λ(1λ=632.8nm),端面平面度达到0.06λ,表面粗糙度达0.55nm(RMS),端面楔角精度可达2″。
Aiming at the ultra-precision machining of slab Nd: YAG crystal, a core working device of high-power slab laser, the processing performance and technological difficulties of slab Nd: YAG crystal with special configuration were analyzed. A new The slab Nd: YAG crystal processing technology based on the synthetic disk polishing, and the slab Nd: YAG crystal with the size of 100 mm × 30 mm × 3 mm were processed. The experimental results show that the synthetic disk polishing can well control the phenomenon of falling edge of the component. By optimizing the abrasive selection, matching the proper size of Al2O3 abrasive in the synthetic disk polishing process can realize the low defect processing of the component, The flatness of the reflective surface reaches 0.217λ (1λ = 632.8nm), the flatness of the end surface reaches 0.06λ, the surface roughness reaches 0.55nm (RMS), and the precision of the end wedge angle can reach 2 ".