论文部分内容阅读
在高功率激光系统中,大口径连续相位板(CPP)元件是用来进行光束整形的关键衍射光学器件,由于其毫米量级的空间周期、大相位梯度的波前特征,大口径干涉仪无法满足检测需求。提出采用小口径高分辨率干涉仪结合子孔径拼接实现相位板元件透射/反射波前的检测,采用了误差均化的拼接方法,设计了针对圆形孔径的数据融合新算法,研制了子孔径拼接检测装置,实现了一块330 mm×330 mm的连续相位板元件透射波前的检测。实验结果表明,针对其毫米量级的周期,最大可检测到的波前梯度接近3μm/cm,检测重复性精度优于6 nm[均方根(RMS)],波前数据模拟焦斑计算结果与高功率激光系统中的远场焦斑特性检测结果获得了较好的一致性。
In high-power laser systems, large-aperture continuous phase plate (CPP) elements are the key diffraction optics used for beam shaping. Due to their millimeter-scale spatial period, large phase gradient wavefront characteristics, large aperture interferometers can not Meet the testing needs. A small aperture high resolution interferometer combined with subaperture splicing is proposed to detect the transmission / reflection wavefront of the phase plate element. A stochastic error stitching method is used to design a new data fusion algorithm for circular aperture. A subaperture Splicing detection device, to achieve a 330 mm × 330 mm continuous phase plate element transmitted wavefront detection. The experimental results show that the maximum detectable wavefront gradient is close to 3μm / cm and the detection repeatability is better than 6 nm [Root Mean Square (RMS)] for the millimeter order period. The wavefront data simulates the calculation results of the focal spot And high-power laser system in the far field focal spot detection results obtained a better agreement.