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为了评估光机结构的长期稳定性,提出了一种偏移量解算的稳定性评估方案。首先进行数学建模,通过敏感矩阵建立了光机结构偏移量与系统波像差变化量的关系式,并给出了基于奇异值分解的偏移量求解方法。然后以微缩投影系统为研究对象,建立了敏感矩阵,在奇异值分解的基础上分析了像差奇异值向量与结构参数奇异值向量的对应关系。通过在实际搭建的微缩投影系统中人为引入偏移量,并与理论解算值进行对比,验证了方案的可行性。最后对系统长期稳定性进行了测试,为后续的结构优化提供了指导。
In order to evaluate the long-term stability of the light machine structure, a solution to the stability evaluation of offset solution is proposed. First of all, mathematical modeling is done. The relation between the displacement of the optical mechanism and the variation of the system wave aberration is established by using the sensitive matrix, and the method of solving the offset based on the singular value decomposition is given. Based on the singular value decomposition, a sensitive matrix is established based on the miniature projection system. The corresponding relationship between the singular value vector and the singular value vector of structure parameters is analyzed. The feasibility of the scheme is verified by introducing the offset into the actual micro-projection system and comparing it with the theoretical solution. Finally, the long-term stability of the system was tested, which provided guidance for the subsequent structural optimization.