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MT┐CVD氮碳化钛涂层新工艺机械部成都工具研究所(610056)陈旭MT-CVD(中温化学气相沉积)氮碳化钛涂层工艺是瑞士Bernex公司在CVD涂层工艺上的一系列创新成果之一,已获得专利权。采用HT-CVD(高温化学气相沉积)工艺沉积氮碳化钛Ti...
MT ┐CVD Nitrogen titanium carbide coating New Technology Machinery Department Chengdu Tool Research Institute (610056) Chen Xu MT-CVD (temperature chemical vapor deposition) Nitrogen titanium carbide coating process is a series of innovations in the Swiss Bernex CVD coating process One of the results, has been patented. Deposition of TiN Ti Ti by HT-CVD (High Temperature Chemical Vapor Deposition)