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ＭＴ┐ＣＶＤ氮碳化钛涂层新工艺机械部成都工具研究所（６１００５６）陈旭ＭＴ－ＣＶＤ（中温化学气相沉积）氮碳化钛涂层工艺是瑞士Ｂｅｒｎｅｘ公司在ＣＶＤ涂层工艺上的一系列创新成果之一，已获得专利权。采用ＨＴ－ＣＶＤ（高温化学气相沉积）工艺沉积氮碳化钛Ｔｉ...
MT ┐CVD Nitrogen titanium carbide coating New Technology Machinery Department Chengdu Tool Research Institute (610056) Chen Xu MT-CVD (temperature chemical vapor deposition) Nitrogen titanium carbide coating process is a series of innovations in the Swiss Bernex CVD coating process One of the results, has been patented. Deposition of TiN Ti Ti by HT-CVD (High Temperature Chemical Vapor Deposition)