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为解决微小内轮廓尺寸为代表的微小尺寸的非接触式超精密测量问题 ,提出了将自聚焦透镜体积小的特点与共焦显微技术的高分辨率和绝对位置跟踪特性相结合的差动式自聚焦共焦微型显微技术的光探测技术 ,建立了相应的传感系统。介绍了系统的工作原理和构成 ,自聚焦透镜测头直径为 1mm ,两个探测器差动设置 ,不但消除了光源的光强漂移和探测器的电子漂移产生的共模噪声 ,提高了测量信噪比 ,而且有效地提高了系统的轴向分辨率。初步实验表明 ,系统轴向分辨率在倾斜度小于 2 0度的范围内可达 5nm。
In order to solve the problem of tiny size non-contact ultra-precision measurement, which is represented by the tiny inner contour size, a differential autofocusing system combining small size of self-focusing lens and high-resolution and absolute position tracking of confocal microscopy Confocal micro-microscopy of light detection technology, the establishment of the corresponding sensing system. The working principle and structure of the system are introduced. The diameter of the self-focusing lens probe is 1mm, and the differential settings of the two detectors not only eliminate the common-mode noise caused by the light intensity drift of the light source and the electron drift of the detector, Noise ratio, but also effectively improve the system’s axial resolution. Preliminary experiments show that the axial resolution of the system can reach 5nm within the range of inclination less than 20 degrees.