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真空比对法校准装置采用了动态直接比对法、静态直接比对法和静态膨胀法,在一台装置上复合了三种方法,满足了拓宽量程的需求。该装置可以1×105~5×10-4 Pa范围内的各类真空规进行校准,是一种结构简单、操作方便、检定效率高、实用性强的真空标准装置。整套装置由涡轮分子泵、校准容器、副标准真空计和金属膨胀阀等部件组成,主要技术指标符合国际标准化组织和国内有关真空标准的规定。
Vacuum calibration of the calibration device using a dynamic direct comparison method, the static direct comparison method and the static expansion method, a device on the complex of the three methods to meet the needs to broaden the range. The device can be calibrated in various vacuum gauges within the range of 1 × 105 ~ 5 × 10-4 Pa, which is a vacuum standard device with simple structure, convenient operation, high verification efficiency and strong practicability. The whole device consists of turbomolecular pump, calibration container, sub-standard vacuum gauge and metal expansion valve and other components, the main technical indicators in line with the International Organization for Standardization and the domestic vacuum standards.