Diamond-like carbon films synthesized on bearing steel surface by plasma immersion ion implantation

来源 :中国有色金属学会会刊:英文版 | 被引量 : 0次 | 上传用户:xiang43
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Diamond-like carbon (DLC) films were synthesized by plasma immersion ion implantation and deposition (PIIID) on 9Cr18 bearing steel surface. Influences of working gas pressure and pulse width of the bias voltage on properties of the thin film were investi
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