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本文对气相沉积法(CVD和PVD)获得的TiC/TiN涂层,通过金相显微镜和扫描电镜的观察,x射线相结构分析,以及硬度、结合力、开裂情况的测定与分析,弄清了涂层的显微组织和相结构,提出了涂层的形成机制。测定结果表明,涂层与基体间的结合力,在高速钢基体上由PVD法沉积的TiN涂层约为7.09kgf/mm~2,在T10钢基体上由CVD法沉积的TiC涂层约为93.82kgf/mm~2。还探讨了涂层的断裂机制,讨论了涂层组织与性能之间的关系。本文的上述研究,为稳定、高效制备优质TiC/TiN涂层提供了依据。
In this paper, the TiC / TiN coatings obtained by vapor deposition (CVD and PVD) were examined by metallographic and scanning electron microscopy, X-ray phase structure analysis, and the determination and analysis of hardness, cohesion and cracking conditions Coating microstructure and phase structure, proposed the formation mechanism of the coating. The results show that the bonding strength between the coating and the substrate is about 7.09kgf / mm ~ 2 by PVD method on the high speed steel substrate, and the TiC coating deposited by CVD method on the T10 steel substrate is about 93.82kgf / mm ~ 2. The fracture mechanism of the coating was also discussed, and the relationship between the coating structure and the properties was discussed. The above research in this paper provides the basis for the stable and efficient preparation of high quality TiC / TiN coatings.