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为了解决普通二维光栅在动态干涉术中光能量利用不足的问题,使用标量衍射理论和傅里叶分析法对矩形正交位相光栅和棋盘型位相光栅的衍射效率进行推导,分别对两种光栅的最佳工作级次选择策略进行研究。分析结果表明,当分光器件为矩形正交位相光栅时,应选择(0,±1)级与(±1,0)级作为动态干涉仪的工作级次,光能量利用率达到54.4%;当分光器件为棋盘位相光栅时,应选择(±1,±1)级作为动态干涉仪的工作级次,光能量利用率达到65%。实验对比了两种光栅在动态干涉仪上的应用效果,当选用(±1,±1)级作为工作级次时,结果表明使用棋盘型位相光栅的应用效果优于矩形正交位相光栅。因此在动态干涉仪中使用棋盘位相光栅并选用(±1,±1)级作为工作级次能够消除光能量利用不足对测量造成的影响。
In order to solve the problem of insufficient utilization of light energy in dynamic two-dimensional interferometry, the diffraction efficiencies of rectangular and phase grating were deduced by using scalar diffraction theory and Fourier analysis. The best work level selection strategy for research. The results show that (0, ± 1) and (± 1,0) orders should be selected as the working order of the dynamic interferometer when the beam splitting device is a rectangular orthogonal phase grating. The light energy utilization rate reaches 54.4% When the beam splitting device is a checkerboard phase grating, the working order of (± 1, ± 1) should be selected as the dynamic interferometer, and the light energy utilization rate reaches 65%. The experimental results show that the application effect of the grating type phase grating is better than that of the rectangular orthogonal phase grating when (± 1, ± 1) is selected as the working level. Therefore, the use of the checkerboard phase grating in the dynamic interferometer and the selection of (± 1, ± 1) order as the working order can eliminate the influence of insufficient light energy utilization on the measurement.