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提出一种融合共焦显微技术和偏振干涉技术的偏振干涉共焦显微测量方法。利用共焦技术进行准确的焦点定位,以获得最佳的测量光斑;同时,利用照射到台阶边缘的不同偏振方向(平行和垂直于台阶边缘)的线偏振光反射后产生的相位变化不同这一特性,进行边缘定位。相位变化是利用外差干涉测相的方法得到的。这一系统完全符合共光路原则,有很强的抗干扰能力。利用该系统对标准线宽样板进行了测量,测量结果与中国计量科学研究院用原子力显微镜测量的结果,以及厂商提供的可溯源到美国NIST光学线宽标准的测量值都符合的很好;还对同一刻线进行了5次重复性测量,其极限偏差为20nm。
A polarization interferometry confocal microscopy method combining confocal microscopy and polarization interferometry is proposed. The confocal technique is used for accurate focus positioning to obtain the best measurement spot. In the meantime, the phase change caused by the linear polarized light reflected by different polarization directions (parallel and perpendicular to the step edge) irradiated to the edge of the step is different Features, edge positioning. The phase change is obtained by the method of heterodyne interferometry. The system is fully in line with the principle of common optical path, a strong anti-interference ability. The system was used to measure the standard linewidth model. The measured results are in good agreement with the results of atomic force microscopy measured by China National Academy of Metrology and the measured values of the optical line width standards traceable to the United States NIST. Five repeatability measurements on the same score with a limit deviation of 20 nm.