一、引言集成电路的发明主要是由于人类掌握了先进的平面型器件结构的设计和加工技术,即在硅表面层几微米厚的区域中可以在相容的工艺条件下制作完成晶体管、电阻和电容的结构。这种以平面型技术为基础的集成电路,其元、器件布局是二维排列,称二维集成 I. INTRODUCTION The invention of the integrated circuit is mainly due to the fact that human beings have mastered the design and processing technology of the advanced planar device structure. That is, in the area of ​​several micrometers thick of the silicon surface layer, the transistor, the resistor and the resistor can be manufactured under the compatible process conditions Capacitor structure. This planar technology-based integrated circuits, the yuan, the device layout is two-dimensional arrangement, said the two-dimensional integration