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详细研究了利用超高真空氩离子清洗技术发展的一种超导铌腔表面的“干式”处理方法,从微观和宏观角度分析了溅射处理对铌的表面特性和对超导腔性能的影响.与传统的“湿式”处理方法(化学抛光BCP和电抛光EP)相比,干式处理方法具有结构简单、容易控制、没有污染等优点,是一种很有潜力的超导腔处理方法,可以提高超导腔的性能.
The “dry” treatment of a superconducting niobium cavity surface developed by using ultra-high vacuum argon ion cleaning technology is studied in detail. The effects of the sputtering treatment on the surface properties of niobium and the influence of the superconducting cavity Performance Compared with the traditional “wet” treatment (chemical polishing BCP and electropolishing EP), the dry treatment method has the advantages of simple structure, easy control, no pollution, etc., and is a potential super The guide cavity treatment method, can improve the performance of the superconducting cavity.