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We report the fabrication of a planar waveguide in the Nd∶Bi12SiO20 crystal by multi-energy C ions at room temperature.The waveguide is annealed at 200 ℃,260 ℃,and 300 ℃ in succession each for 30 min in an open oven.The effective refractive index profiles at transverse electric (TE) polarization are stable after the annealing treatments.Damage distribution for multi-energy C ion implanted in Nd∶Bi12SiO20 crystal is calculated by SRIM 2010.The Raman and fluorescence spectra of the Nd∶Bi12SiO20 crystal are collected by an excitation beam at 633 nm and 473 nm,respectively.The results indicate the stabilization of the optical waveguide in Nd∶Bi12SiO20 crystal.