日本真空技术研究所开始销售能非接触测量表面粗糙度的装置TMS系列。该系列有硬盘检测用“TMS—2000”,8in晶片检测用“TMS—2000W”,300mm晶片检测用“TMS—3000W”三个机种。该产品是把激光照射在被检查物的表面上可以检测从其反射光中的正反射光强度和散射光强度的差值,它的能力相当于以往触针方式1000倍,实现0.01(?)分辨率。(No.13) Japan Institute of Vacuum Technology began selling TMS series of devices capable of non-contact measurement of surface roughness. This series has three models of “TMS-2000” for hard disk inspection, “TMS-2000W” for 8in wafer inspection, and “TMS-3000W” for 300mm wafer inspection. The product is the laser irradiation on the surface of the object can be detected from the reflected light in the reflected light intensity and scattered light intensity difference, which is equivalent to the previous stylus 1000 times the ability to achieve 0.01 (?) Resolution. (No.13)