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为了提高熔石英基片对351nm短波长激光的损伤阈值,采用光栅式扫描方式,利用CO2激光器输出10.6μm波长的激光,对氢氟酸蚀刻后的小口径熔石英基片表面进行功率周期递增的辐照扫描。结果表明,经过CO2激光预处理后的熔石英基片,表面微观形貌得到了有效改善;利用S:1的方法测量熔石英基片损伤阈值。结果发现,在中度激光抛光的程度下,其零概率损伤阈值提高了30%左右,且对透射波前没有造成不利影响,从而证明了CO2激光预处理提高熔石英基片抗激光损伤能力的有效性。
In order to improve the damage threshold of the fused silica substrate to 351nm short wavelength laser, the surface of hydrofluoric acid etched small diameter fused silica substrate was periodically increased by grating scanning and CO2 laser was used to output 10.6μm wavelength laser. Irradiation scanning. The results showed that the surface morphology of fused-silica substrate pretreated by CO2 laser was effectively improved. The damage threshold of fused silica substrate was measured by S: 1 method. The results show that under the condition of moderate laser polishing, the zero probability damage threshold is increased by about 30%, and there is no adverse effect on the transmitted wavefront, which proves that CO2 laser pretreatment can improve the anti-laser damage ability of the fused silica substrate Effectiveness.