论文部分内容阅读
采用常压射频等离子体增强化学气相沉积法(AP-PECVD)制备了TiO_2纳米晶颗粒薄膜,研究了不同等离子体滞留时间下气相反应对沉积过程的影响.采用发射光谱(OES)测量拟合了等离子体的电子温度Te约为32 492.6K、离子温度Ti约为850K,采用热电偶(TC)在线测量等离子体外电极温度T约为662K;由于沉积所获样品为TiO_2锐铁矿晶型,认为等离子体气相温度为662~850K,主要受功率密度的影响.外加电压和电流的研究结果表明,放电形式为等离子体容性耦合辉光放电.采用场发射扫描电子显微镜(FESEM)、高分辨透射电子显微镜(HRTEM)、X射线衍射(XRD)、拉曼(Raman)等测量了沉积薄膜的形貌和结构,分析后发现:当反应气体在等离子体相滞留时间仅为27ns时,沉积的薄膜就开始出现明显的锐钛矿相TiO_2结晶结构,并均为粒径10nm左右的纳米颗粒组成的薄膜;同时随着滞留时间的增加,结晶度增加,薄膜的形貌由分离的纳米团簇变为由锐钛矿纳米颗粒连接的多孔均匀薄膜.研究结果对快速制备多孔锐钛矿TiO_2纳米晶颗粒薄膜有重要的指导意义.
TiO 2 nanocrystalline granular films were prepared by atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD), and the effect of gas phase reaction on the deposition process under different plasma residence time was investigated. The emission spectra (OES) Plasma electron temperature Te is about 32 492.6K, ion temperature Ti is about 850K, the on-line measurement using a thermocouple (TC) plasma electrode temperature T is about 662K; due to the deposited sample is TiO 2 anatase crystal form, that Plasma gas temperature of 662 ~ 850K, mainly by the power density.The results of the applied voltage and current show that the discharge form of plasma capacitively coupled glow discharge using field emission scanning electron microscopy (FESEM), high resolution transmission The morphology and structure of the deposited films were measured by means of HRTEM, XRD and Raman. The results showed that when the plasma phase residence time was only 27ns, the deposited films Began to appear obvious anatase phase TiO 2 crystalline structure, and are about 10nm particle size of the nanoparticles composed of thin film; at the same time as the retention time increases, the crystallinity increases, the film The morphology was changed from the separated nanoclusters into a porous uniform film connected by anatase nanoparticles.The research results have important guiding significance for the rapid preparation of porous anatase TiO2 nanocrystalline granular films.