采用溶胶-凝胶法在玻璃衬底上成功制备出Y3+掺杂的透明ZnO薄膜。通过X射线衍射仪(XRD)、扫描电镜(SEM)和紫外分光光度计分析了掺杂Y3+对ZnO薄膜结构和性能的影响。结果表明:Y3+成功掺入氧化锌的晶格内;随着掺杂浓度的提高,薄膜的透光率并未表现出一定的规律性;随着退火温度升高,薄膜的透光率明显得到提高;在530℃退火时,薄膜的表面形貌形成网状结构且透光率达到70%左右。 Y3 + doped ZnO thin films were successfully prepared on glass substrate by sol-gel method. The effect of doped Y3 + on the structure and properties of ZnO thin films was analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultraviolet spectrophotometer. The results showed that Y3 + was successfully incorporated into the crystal lattice of zinc oxide. With the increase of doping concentration, the transmittance of the film did not show a certain regularity. With the increase of annealing temperature, the transmittance of the film was obviously When annealed at 530 ℃, the surface morphology of the film formed a network structure and the transmittance reached about 70%.