目前,大多数硅压阻传感器（PRT）用于压力测量,它们通过应用广泛的微型加工技术进行组装,通常采用4个电阻桥臂构成典型的惠斯通电桥,安装在单芯片。与集成电路类似,由于单个晶片中包含成百上千个传感元件,传感器价格便宜。到目前为止,大多数集成传感器主要用于低精度或中等精度要求的场合,比如汽车、消费电子产品和部分工业应用。 Currently, most silicon piezoresistive sensors (PRTs) are used for pressure measurement. They are assembled using a wide range of microfabrication techniques. Typically, four resistive legs form a typical Wheatstone bridge mounted on a single chip. Like integrated circuits, sensors are inexpensive because of the hundreds of sensing elements contained in a single chip. To date, most integrated sensors have been used primarily for low- or medium-precision applications such as automotive, consumer electronics and some industrial applications.