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现代工业的发展要求真空镀膜设备具有对复杂曲面零部件进行均匀镀膜的能力,要实现此类工件的镀膜要求,只有引进机器人技术才能达到。本文介绍了机器人系统在磁控溅射镀膜机中的应用,并对镀膜机器人应用条件和控制过程进行论述。
The development of modern industry requires that the vacuum coating equipment has the ability to uniformly coat complex curved surface parts. To achieve the coating requirements of such workpieces, only the introduction of robotics can be achieved. This paper introduces the application of robot system in magnetron sputter coating machine, and discusses the application conditions and control process of coating robot.