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本文建立了数字电声像的采集装置。在扫描电声显微镜(SEAM:ScanningElectron-Acous-ticMicroscope)系统中采用了数字扫描发生器,代替了原来的模拟扫描发生器,从而实现由计算机控制电子束在试样上的扫描。通过数字图像处理,明显提高了电声像的信噪比,改善了电声像的质量。新系统还可以方便地对电声像进行优化、储存和打印处理。
This paper established a digital electro-acoustic image acquisition device. A digital scanning generator was used in the SEAM (Scanning Electron-Acoustiic Microscope) system instead of the original analog scanning generator, so that the computer controlled scanning of the electron beam on the sample was realized. Through the digital image processing, the signal-to-noise ratio of the electro-acoustic image is obviously improved, and the electro-acoustic image quality is improved. The new system also makes it easy to optimize, store and print electro-acoustic images.