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本文提出了适田于X射线荧光(XRF)定量分析薄膜料材的组分和质量厚度的LAMA程序的改进方案。在用LAMA-1程序时,有时会遇到发散和缓慢会聚的问题,由于使用了线性逼近法并同时改进了组分和厚度的运算方法而得到消除,这就大大地提高了程序的功能和特性。通过100多个模拟薄膜的研究表明,比LAMA-1的会聚快得多的LAMA-2程序给出了更好的精确度。程序的效能已提高到在一台微型计算机上能顺便操作的程度。
In this paper, we propose an improved scheme of Katamata X-ray fluorescence (XRF) quantitative analysis of the composition and mass thickness of thin film material LAMA program. Problems with divergence and slow convergence are sometimes encountered with the LAMA-1 program, which is greatly reduced by the use of a linear approximation method with improved computation of composition and thickness, which greatly improves program functionality and characteristic. Studies from more than 100 simulated thin films show that the LAMA-2 procedure, which is much faster than the convergence of LAMA-1, gives better accuracy. The effectiveness of the program has been raised to the point where it can be manipulated by a microcomputer.